Title :
Laser signal injection microscopy of Si integrated circuits with a numerical aperture increasing lens
Author :
Ippolito, Stephen B. ; Goldberg, Bennett B. ; Ünlü, M. Selim ; Levin, Theodore M. ; Vallett, David P.
Author_Institution :
Dept. of Phys. & Electr. & Comput. Eng., Boston Univ., MA
Abstract :
Numerical aperture increasing lens (NAIL) microscopy in reflected light imaging of Si integrated circuits is applied to laser signal injection microscopy. The improved lateral spatial resolution and signal to noise ratio provided by NAIL microscopy will greatly enhance the capability of laser signal injection microscopy
Keywords :
elemental semiconductors; integrated circuits; laser beam applications; lenses; optical microscopy; silicon; NAIL microscopy; Si; Si integrated circuits; laser signal injection microscopy; numerical aperture increasing lens; signal-to-noise ratio; spatial resolution; Apertures; Circuit testing; Focusing; Laser noise; Laser theory; Lenses; Microscopy; Nails; Physics; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1547966
