DocumentCode
2631836
Title
Laser signal injection microscopy of Si integrated circuits with a numerical aperture increasing lens
Author
Ippolito, Stephen B. ; Goldberg, Bennett B. ; Ünlü, M. Selim ; Levin, Theodore M. ; Vallett, David P.
Author_Institution
Dept. of Phys. & Electr. & Comput. Eng., Boston Univ., MA
fYear
2005
fDate
22-22 Oct. 2005
Firstpage
236
Lastpage
237
Abstract
Numerical aperture increasing lens (NAIL) microscopy in reflected light imaging of Si integrated circuits is applied to laser signal injection microscopy. The improved lateral spatial resolution and signal to noise ratio provided by NAIL microscopy will greatly enhance the capability of laser signal injection microscopy
Keywords
elemental semiconductors; integrated circuits; laser beam applications; lenses; optical microscopy; silicon; NAIL microscopy; Si; Si integrated circuits; laser signal injection microscopy; numerical aperture increasing lens; signal-to-noise ratio; spatial resolution; Apertures; Circuit testing; Focusing; Laser noise; Laser theory; Lenses; Microscopy; Nails; Physics; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Conference_Location
Sydney, NSW
Print_ISBN
0-7803-9217-5
Type
conf
DOI
10.1109/LEOS.2005.1547966
Filename
1547966
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