The research on pickup micromanipulation method of the microparticles

The manipulation of particles at the micro-scale is of great importance and challenge in the fields of electronics and bioengineering. This paper firstly analyzes the micro-scale adhesive force generated during the pickup process. Then a dynamic adhesive contact model was established. Based on this model, the performances of microgripper such as the micromanipulation acceleration, inertial force, and adhesion force for the pickup manipulation are investigated by dynamics modeling and simulation. Pickup experiment is conducted under various conditions and sizes of microparticles. The result has confirmed that microgripper can achieve an effective and reliable pickup manipulation of microparticles.