Title :
Near-infrared photon emission spectroscopy of a 45 nm SOI ring oscillator
Author :
Kindereit, Ulrike ; Weger, Alan J. ; Stellari, Franco ; Song, Peilin ; Deslandes, Hervé ; Lundquist, Ted ; Sabbineni, Prasad
Author_Institution :
T.J. Watson Res. Center, Circuit Test & Diagnostics Technol., IBM, Yorktown Heights, NY, USA
Abstract :
This paper presents, for the first time, near-infrared spectral photon emission measurements of a ring oscillator in IBM´s 45 nm SOI process technology. The setup employs a cryogenically cooled MCT camera and different band-pass filters with a very broad spectral range from 850-2100 nm. The paper presents the spectral data, discusses the thermal contributions, and analyzes its impact for selecting appropriate detectors and tools for time-resolved measurements in present and future technology nodes.
Keywords :
band-pass filters; infrared spectroscopy; oscillators; silicon-on-insulator; IBM SOI process technology; SOI ring oscillator; band-pass filters; cryogenically cooled MCT camera; near-infrared photon emission spectroscopy; near-infrared spectral photon emission measurement; size 45 nm; thermal contributions; time-resolved measurements; Band pass filters; Cameras; Photonics; Switches; Temperature measurement; Voltage measurement; Wavelength measurement; HgCdTe; MCT; PEM; Photon emission microscopy; SOI; failure analysis; red shift; spectroscopy;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2012 IEEE International
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4577-1678-2
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2012.6241783
