Coarse and fine motion micro robot with six degrees of freedom

Author

Kusunoki, Shinya ; Torii, Akihiro ; Doki, Kae ; Ueda, Akiteru

Author_Institution

Aichi Inst. of Technol., Toyota

fYear

2007

fDate

11-14 Nov. 2007

Firstpage

56

Lastpage

61

Abstract

Displacement of a micro robot is described theoretically and experimentally. The structure of the robot is a Stewart-platform using six stacked-type piezoelectric actuators. The robot, which can realize a precise motion, is developed for a flexible conveying system, such as a desktop manufacturing system. The robot is used in a micro/nano system which requires a nanometer resolution. We describe the principle of the motion and demonstrate the self-propelled motion and the precise motion.

Keywords

DP industry; flexible manufacturing systems; industrial robots; microcomputers; microrobots; motion control; piezoelectric actuators; Stewart platform; coarse motion microrobot; desktop manufacturing system; fine motion microrobot; flexible conveying system; microrobot Displacement; microsystem; motion control; nanometer resolution; nanosystem; precise motion; self-propelled motion; stacked-type piezoelectric actuators; Adhesives; Connectors; Electromagnets; Frequency; Leg; Manufacturing systems; Parallel robots; Piezoelectric actuators; Position control; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2007. MHS '07. International Symposium on

Conference_Location

Nagoya

Print_ISBN

978-1-4244-1858-9

Electronic_ISBN

978-1-4244-1858-9

Type

conf

DOI

10.1109/MHS.2007.4420826

Filename

4420826