DocumentCode
2633908
Title
Development of the Maskless Exposure Device equipped with a LCD-Projector for Fabrication of Micropatterned Surfaces and Microfluidic Channels
Author
Itoga, Kazuyoshi ; Kobayashi, Jun ; Tsuda, Yukiko ; Yamato, Masayuki ; Kikuchi, Akihiko ; Okano, Teruo
Author_Institution
Tokyo Women´´s Med. Univ., Tokyo
fYear
2007
fDate
11-14 Nov. 2007
Firstpage
169
Lastpage
172
Abstract
A newly developed device for photolithography of micropatterns without the preparation of photomasks by a modified, commercially available liquid crystal display projector (LCDP) was reported. The novel devise was equipped with an XY positioning stage, sliding system for variable focal distance, and exchangeable objective lens, facilitating the exposure of micropatterns with large area and variable resolution.
Keywords
liquid crystal displays; microfluidics; photolithography; liquid crystal display projector; maskless exposure device; microfluidic channels fabrication; micropatterned surfaces fabrication; photolithography; Fabrication; Image generation; Image resolution; Lenses; Lithography; Microchannel; Microcomputers; Microfluidics; Prototypes; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science, 2007. MHS '07. International Symposium on
Conference_Location
Nagoya
Print_ISBN
978-1-4244-1858-9
Electronic_ISBN
978-1-4244-1858-9
Type
conf
DOI
10.1109/MHS.2007.4420846
Filename
4420846
Link To Document