Advanced Simulation for Shape-prediction of 3-D PTFE Microstructures Fabricated by Using Synchrotron Radiation

Simulations for deformed shape-predictions of the 3-dimensional polytetrafluoroethylene (PTFE) microstructures fabricated by synchrotron radiation (SR) direct etching is described in this paper. PTFE is a remarkable material, therefore the applications to various devices is expected. We aim at the application to the device which used PTFE, we research for establishment of the highly accuracy three-dimensional maicrofabrication technology of PTFE by using SR light. As part of their research, the simulation system for shape-prediction has been built. Since the advantage of the shape-prediction system can grasp shape without experimenting, reduction of fabrication time and cost can be performed. In addition, it is a technique useful also to investigation and an elucidation of a processing mechanism. In this report, comparison with the structure fabricated by experiment and the shape computed by the shape-prediction system was performed.