Title :
Characterizations of elastic constants of transparent thin films deposited on substrates by laser ultrasonic method
Author :
Li, Zhe ; Ma, Di ; Zhang, Shu-yi ; Wasa, Kiyotaka ; Shui, Xiu-ji
Author_Institution :
Lab. of Modern Acoust., Nanjing Univ., Nanjing
Abstract :
A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have been evaluated.
Keywords :
elastic constants; laser deposition; sputter deposition; surface acoustic waves; thin films; ultrasonic applications; RF magnetron sputtering; elastic constants; laser generation; laser ultrasonic method; optical difference detection method; surface acoustic waves; transparent thin films; Acoustic signal detection; Acoustic waves; Character generation; Optical detectors; Optical films; Optical surface waves; Sputtering; Substrates; Surface acoustic waves; Surface emitting lasers; Laser-ultrasonics; elastic constants; thin films;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-2891-5
DOI :
10.1109/SPAWDA.2008.4775807
