Characterizations of elastic constants of transparent thin films deposited on substrates by laser ultrasonic method

Author

Li, Zhe ; Ma, Di ; Zhang, Shu-yi ; Wasa, Kiyotaka ; Shui, Xiu-ji

Author_Institution

Lab. of Modern Acoust., Nanjing Univ., Nanjing

fYear

2008

fDate

5-8 Dec. 2008

Firstpage

350

Lastpage

353

Abstract

A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have been evaluated.

Keywords

elastic constants; laser deposition; sputter deposition; surface acoustic waves; thin films; ultrasonic applications; RF magnetron sputtering; elastic constants; laser generation; laser ultrasonic method; optical difference detection method; surface acoustic waves; transparent thin films; Acoustic signal detection; Acoustic waves; Character generation; Optical detectors; Optical films; Optical surface waves; Sputtering; Substrates; Surface acoustic waves; Surface emitting lasers; Laser-ultrasonics; elastic constants; thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on

Conference_Location

Nanjing

Print_ISBN

978-1-4244-2891-5

Type

conf

DOI

10.1109/SPAWDA.2008.4775807

Filename

4775807