Title :
Fabrication of 40 kHz receiving piezoelectric micro-machined ultrasonic transducers
Author :
WANG, Meng-jiao ; HAO, Z. Hen-hong ; QIAO, Dong-hai
Author_Institution :
Inst. of Acoust., Chinese Acad. of Sci., Beijing
Abstract :
This paper presents the fabrication of piezoelectric micro-machined ultrasonic transducers (PMUT) used in acoustic location field in the air. The transducer consists of piezoelectric ZnO thin film and the membrane made of Si3N4. The calculation of the vibration mode of PMUT has been made by the FEM method. Experiment results indicate the resonant frequency of the PMUT is 43.7 kHz. The initial results on receiving experiment using the PMUT as the receiver with the matching circuit are also presented.
Keywords :
II-VI semiconductors; piezoelectric transducers; semiconductor thin films; ultrasonic transducers; zinc compounds; FEM method; ZnO; frequency 43.7 kHz; matching circuit; piezoelectric ZnO thin film; piezoelectric micro-machined ultrasonic transducers; vibration mode; Acoustic transducers; Biomembranes; Circuits; Fabrication; Piezoelectric films; Piezoelectric transducers; Resonant frequency; Semiconductor thin films; Ultrasonic transducers; Zinc oxide; Piezoelectric micro-machined ultrasonic transducers; ZnO film; matching circuit;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-2891-5
DOI :
10.1109/SPAWDA.2008.4775814
