Investigation of the piezoelectric properties of semiconducting nanostructures

Author

Peng, Bei ; Wu, Ling-hua ; Luo, Hao-wen ; Xu, Wen-hong ; Horacio, Espinosa

Author_Institution

Center for Micro & Nano Electromech. Syst., Univ. of Electron. Sci. & Technol. of China, Chengdu

fYear

2008

fDate

5-8 Dec. 2008

Firstpage

390

Lastpage

394

Abstract

In this paper, the piezoelectric properties of semiconducting nano structures have been investigated. The piezoelectric effect can be characterized via a nano-scale material testing system that utilizing microelectromechanical systems technology. The coefficients were measured by applying a voltage (field) and measuring the induced elongation (strain). It can be readily seen that the piezoelectric effects in nanostructures are generally non-linear and the coefficient is much higher than that for bulk.

Keywords

nanostructured materials; piezoelectricity; semiconductors; elongation; microelectromechanical systems; piezoelectric effect; semiconducting nanostructures; Gallium nitride; Materials testing; Mechanical engineering; Micromechanical devices; Piezoelectric effect; Piezoresistance; Semiconductivity; Semiconductor nanostructures; Strain measurement; Voltage; Semiconducting; microeletromechanical systems; nanostructures; piezo;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on

Conference_Location

Nanjing

Print_ISBN

978-1-4244-2891-5

Type

conf

DOI

10.1109/SPAWDA.2008.4775816

Filename

4775816