Improvement of the low speed controllability of a V-shaped, two bolt-clamped Langevin-type transducer, ultrasonic linear motor

A V-shaped, two bolt-clamped Langevin-type transducer, ultrasonic linear motor VSM was developed. In this study, the low speed controllability of the VSM was improved by the development of a new driving principle in which a feedback control was applied. The speed of the VSM was more than 1500mm/sec and the velocity error was approximately 0.2% when driven at 1000mm/sec. Ten nm step driving also could be obtained, and lnm resolution was observed. In the combination of a fast mode and a micro-motion mode, the stage was settled to a target position of plusmnlnm.