Title :
A novel temperature stable composite substrates for surface acoustic wave applications
Author :
Gong, Xun ; Zhang, De
Author_Institution :
Dept. of Electron. Sci. & Eng., Nanjing Univ., Nanjing
Abstract :
The temperature coefficient of delay (TCD) of the surface acoustic wave (SAW) on the amorphous TeO2 /36deg to 46deg Y-X LiTaO3 layered substrates have been investigated. Other characteristics important for SAW applications such as wave modes, electromechanical coupling coefficient (K2) have also been calculated. It is found that they simultaneously have a very high K2 around 8%, a pure transverse surface wave mode and a zero TCD. The TCD can reach zero when the thickness of amorphous TeO2 film is much less than that of conventional SiO2 film, which means SAW devices on such substrates can be fabricated easily.
Keywords :
electromechanical effects; films; lithium compounds; surface acoustic wave delay lines; tellurium compounds; SAW devices; TeO2-LiTaO3; amorphous film; amorphous layered substrates; composite substrates; electromechanical coupling coefficient; surface acoustic wave; surface acoustic wave applications; temperature coefficient-of-delay; transverse surface wave mode; wave modes; Acoustic waves; Amorphous materials; Delay; Filtering theory; Piezoelectric films; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; TeO2 film; Temperature coefficient of delay; composite plate;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-2891-5
DOI :
10.1109/SPAWDA.2008.4775850
