A novel temperature stable composite substrates for surface acoustic wave applications

Author

Gong, Xun ; Zhang, De

Author_Institution

Dept. of Electron. Sci. & Eng., Nanjing Univ., Nanjing

fYear

2008

fDate

5-8 Dec. 2008

Firstpage

550

Lastpage

552

Abstract

The temperature coefficient of delay (TCD) of the surface acoustic wave (SAW) on the amorphous TeO₂ /36deg to 46deg Y-X LiTaO₃ layered substrates have been investigated. Other characteristics important for SAW applications such as wave modes, electromechanical coupling coefficient (K2) have also been calculated. It is found that they simultaneously have a very high K2 around 8%, a pure transverse surface wave mode and a zero TCD. The TCD can reach zero when the thickness of amorphous TeO₂ film is much less than that of conventional SiO₂ film, which means SAW devices on such substrates can be fabricated easily.

Keywords

electromechanical effects; films; lithium compounds; surface acoustic wave delay lines; tellurium compounds; SAW devices; TeO₂-LiTaO₃; amorphous film; amorphous layered substrates; composite substrates; electromechanical coupling coefficient; surface acoustic wave; surface acoustic wave applications; temperature coefficient-of-delay; transverse surface wave mode; wave modes; Acoustic waves; Amorphous materials; Delay; Filtering theory; Piezoelectric films; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; TeO2 film; Temperature coefficient of delay; composite plate;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves, and Device Applications, 2008. SPAWDA 2008. Symposium on

Conference_Location

Nanjing

Print_ISBN

978-1-4244-2891-5

Type

conf

DOI

10.1109/SPAWDA.2008.4775850

Filename

4775850