Improving defect localization techniques with laser beam with specific analysis and set-up modules

This paper describes a way to improve commonly used static laser stimulation techniques. Several analysis and set-up modules are presented to enrich them. Quickly assembled, combinable and easily adaptable, they allow for example to face atypical failure analysis cases. Effectiveness of this methodology is verified by two cases study. The proposed methodology further extends the capabilities of Laser Stimulation techniques in debug design and characterization domains.