• DocumentCode
    2635807
  • Title

    Polymeric microring resonator using nanoimprint technique based on a stamp incorporating a smoothing buffer layer

  • Author

    Kim, Do-Hwan ; Im, Jung-Gyu ; Lee, Sang-Shin ; Ahn, Seh-Won ; Lee, Ki-Dong

  • Author_Institution
    Dept. of Electron. Eng., Kwangwoon Univ., Seoul
  • fYear
    2005
  • fDate
    22-22 Oct. 2005
  • Firstpage
    691
  • Lastpage
    692
  • Abstract
    A polymeric microring resonator was fabricated using the nanoimprint technique based on a stamp incorporating a smoothing layer. The waveguide scattering loss was greatly reduced to provide for a quality factor of ~103800
  • Keywords
    Q-factor; micro-optics; nanolithography; optical fabrication; optical losses; optical polymers; optical resonators; soft lithography; nanoimprint; polymeric microring resonator; quality factor; smoothing buffer layer; stamp; waveguide scattering loss; Buffer layers; Light scattering; Optical coupling; Optical losses; Particle scattering; Polymers; Q factor; Rough surfaces; Smoothing methods; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
  • Conference_Location
    Sydney, NSW
  • Print_ISBN
    0-7803-9217-5
  • Type

    conf

  • DOI
    10.1109/LEOS.2005.1548186
  • Filename
    1548186