Title :
Polymeric microring resonator using nanoimprint technique based on a stamp incorporating a smoothing buffer layer
Author :
Kim, Do-Hwan ; Im, Jung-Gyu ; Lee, Sang-Shin ; Ahn, Seh-Won ; Lee, Ki-Dong
Author_Institution :
Dept. of Electron. Eng., Kwangwoon Univ., Seoul
Abstract :
A polymeric microring resonator was fabricated using the nanoimprint technique based on a stamp incorporating a smoothing layer. The waveguide scattering loss was greatly reduced to provide for a quality factor of ~103800
Keywords :
Q-factor; micro-optics; nanolithography; optical fabrication; optical losses; optical polymers; optical resonators; soft lithography; nanoimprint; polymeric microring resonator; quality factor; smoothing buffer layer; stamp; waveguide scattering loss; Buffer layers; Light scattering; Optical coupling; Optical losses; Particle scattering; Polymers; Q factor; Rough surfaces; Smoothing methods; Surface roughness;
Conference_Titel :
Lasers and Electro-Optics Society, 2005. LEOS 2005. The 18th Annual Meeting of the IEEE
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-9217-5
DOI :
10.1109/LEOS.2005.1548186
