Synchronous integrator based on digital control system for silicon micromachined gyroscope

For the decoupled dual-mass silicon Micromachined gyroscope developed by Southeast University, drive mode and sense mode are analyzed. In order to improve the precision of silicon Micromachined gyroscope, the demodulation algorithm based on synchronous integrator circuit for gyroscope digital control system is proposed. Combining with Automatic Gain Control (AGC) and Phase-Locked Loop (PLL) technology, the closed-loop control of drive mode and high precision output of sense mode of silicon Micromachined gyroscope have been implemented. In order to verify the effect of the synchronous integrator circuit applied in gyroscope control system, the Print Circuit Board (PCB) based on Field Programmable Gate-Array (FPGA) digital circuit is manufactured and the corresponding experiment is carried out. The results of test show that the synchronous integrator demodulation algorithm of digital control system for silicon Micromachined gyroscope has achieved good performance. The bias stability of tested gyroscope is 0.2^o/hr and the angle random walk is measured to be 0.14^o/√hr. The results demonstrate that the proposed synchronous integrator demodulation scheme is effective.