Title :
Parameter extraction of resistive thermal microsensors by AC electrical method
Author :
Ou-Yang, Mang ; Sheen, Chin-Shown ; Shie, Jin-Shown
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
Device parameters of thermal microsensors are essential for evaluating the sensor performances and their simulation modeling. We report an AC electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results obtained are compared with other methods
Keywords :
bolometers; characteristics measurement; electric resistance measurement; harmonic analysis; microsensors; resistance thermometers; semiconductor device models; temperature sensors; thermal resistance; AC electrical method; microbolometer; output voltage; parameter extraction; relatively simple instrumentation; resistance parameters; resistive thermal microsensors; second harmonic signal; sensor performance; simulation modeling; sinusoidal driving current; temperature coefficient of resistance; thermal capacitance; thermal conductance; Capacitance; Electric resistance; Instruments; Microsensors; Parameter extraction; Performance evaluation; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1997. IMTC/97. Proceedings. Sensing, Processing, Networking., IEEE
Conference_Location :
Ottawa, Ont.
Print_ISBN :
0-7803-3747-6
DOI :
10.1109/IMTC.1997.610253
