Title :
Modification Of Compact Bipolar Transistor Model For DFM (design For Manufacturing) Applications
Author :
Yoshitomi, S. ; Kawakyu, K. ; Teraguchi, T. ; Kimijina, H. ; Yonemura, K.
Author_Institution :
Toshiba Corp. Semicond. Co., Taipei
Abstract :
This paper describes the methodology of how to link process information with SPICE compact models. This is called DFM (design for manufacturing). We would like to propose "BJT physical model card" as a solution of DFM design of BiCMOS integrated circuit. This is a SPICE compact model card of bipolar transistors (HiCUM and Gummel-Poon), which utilizes link between model parameters and few process parameters (ex. base width, base doping concentration). Experimental formulae describing the effect of doping concentration on the bulk mobility, bulk resistance and diffusion coefficient are the main heart of this card. This enables circuit engineers perform the reasonable yield analysis prior to the mass production. Two adaptation examples were shown by the use of TOSHIBA\´s fT=45GHz SiGe BiCMOS technology. Its applicability was confirmed by the measurement data of single transistors and test circuit (3 stages power amplifier for 2.4GHz application)
Keywords :
BiCMOS integrated circuits; Ge-Si alloys; bipolar transistor circuits; design for manufacture; integrated circuit modelling; 2.4 GHz; 45 GHz; BJT physical model card; BiCMOS integrated circuit; BiCMOS technology; SiGe; bipolar transistor model; design for manufacturing; model parameters; process information; yield analysis; BiCMOS integrated circuits; Bipolar transistors; Circuit testing; Design for manufacture; Doping; Heart; Integrated circuit modeling; SPICE; Semiconductor process modeling; Virtual manufacturing;
Conference_Titel :
Mixed Design of Integrated Circuits and System, 2006. MIXDES 2006. Proceedings of the International Conference
Conference_Location :
Gdynia
Print_ISBN :
83-922632-2-7
DOI :
10.1109/MIXDES.2006.1706552