Fabrication, Characterization, and Modeling of Fully-Batch-Fabricated Piston-Type Electrodynamic Microactuators

This paper presents the fabrication, characterization, and modeling of electrodynamic microactuators. The actuators are piston-type devices, each comprising of a circular flexible polydimethylsiloxane membrane, a multi-turn Cu coil, and an integrated powder-based NdFeB permanent magnet. The devices are fully batch-fabricated in a single wafer using only three masks. Ranging in diameter from 2.5 to 5.2 mm, three different device designs are quasi-statically and dynamically characterized for their electromechanical performance. The resonant frequencies of the three actuators range from 224 to 820 Hz. The maximum displacements span from 4 to 64 μm for an input power ranging from 250 to 525 mW. The experimental results are supported by a parametric lumped element model of the transducer.