Title :
A MEMS-EDA-methodology Based On Process Management
Author :
Brück, R. ; Hahn, K. ; Popp, J. ; Schmidt, T. ; Wagener, A. ; Wahl, M.
Author_Institution :
Siegen Univ.
Abstract :
Today\´s MEMS-design is frequently supported by EDA-frameworks made for micro electronic circuits or derived from microelectronics frameworks. These frameworks usually do not completely meet the requirements of MEMS design. This is due to the fact that they are optimized to manage huge amounts of devices from a very limited set of device types (management of complexity). However, because of the inherently 3-dimensional-nature of MEMS products, MEMS design requires the application specific forming of the fabrication process to be used (management of technology). This paper first introduces the methodology of "management of technology" and then uses the example of the PROMENADE-framework to demonstrate how this methodology can be utilized to increase MEMS-design productivity
Keywords :
electronic design automation; micromechanical devices; technology management; MEMS EDA methodology; MEMS design; PROMENADE framework; process management; technology management; Design automation; Design methodology; Electronic circuits; Electronic design automation and methodology; Fabrication; Microelectronics; Micromechanical devices; Process design; Product design; Registers;
Conference_Titel :
Mixed Design of Integrated Circuits and System, 2006. MIXDES 2006. Proceedings of the International Conference
Conference_Location :
Gdynia
Print_ISBN :
83-922632-2-7
DOI :
10.1109/MIXDES.2006.1706567
