Title :
Application of a novel capacitive sensor in precise positioning systems
Author :
Chen, Tao ; Chen, Liguo ; Pan, Mingqiang ; Sun, Lining
Author_Institution :
Robot. & Microsyst. Center, Soochow Univ., Suzhou, China
Abstract :
This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10 μm, with resolution of 5 nm.
Keywords :
beams (structures); cantilevers; capacitive sensors; closed loop systems; displacement control; flexible structures; micromachining; nanopositioning; precision engineering; S-type beam; bulk micromachining technology; capacitive sensor; closed-loop control; comb-finger capacitive displacement sensor; flexible cantilever; nanopositioning stage; nanopositioning system; offset constant-tooth; position range; precise positioning system; single crystal silicon wafer; structure performance; surface micromachining technology; Capacitance; Capacitive sensors; Electrodes; Robot sensing systems; Sensitivity; Silicon; Structural beams; capacitive displacement sensor; comb-finger capacitance; microelectromechanical systems (MEMS); nano-positioning stage;
Conference_Titel :
Industrial Electronics and Applications (ICIEA), 2011 6th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-8754-7
Electronic_ISBN :
pending
DOI :
10.1109/ICIEA.2011.5975867
