• DocumentCode
    2641314
  • Title

    Measurements Of Operating And Bias Voltages Of A Parallel Plate RF Discharge With A Magnetic Field Parallel To The Driven Electrode.

  • Author

    Bletzinger, P.

  • Author_Institution
    Aero Propulsion and Power Directorate
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    86
  • Lastpage
    86
  • Keywords
    Electrodes; Electrons; Etching; Gases; Ionization; Magnetic field measurement; Magnetic fields; Radio frequency; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697755
  • Filename
    697755
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2641314