Microrobot and applications

Historical background of the micromachine and its applications are presented, and the future state of microrobots is discussed. Microdevices, such as a microsensor, microactuator, and microprocessor are all important to build an integrated micromachine. If the “sensing part”, “actuating part” and “logical judging part” are unified in a micro body, it is possible to make a microrobot. If this unification can be down with the batch process of mass production, an idea for a machine will change from an origin at once. A microrobot offers the opportunity of expanding the application fields of mechatronics in the future. The problem statement, application fields and future trends of microrobots are discussed