Performance degradation of defective MEMS tunable RF filter

Author

Wong, W.S.H. ; Su, H.T. ; Lee, K.C. ; Ali, M. A Mohd ; Majlis, Burhanuddin Yeop

Author_Institution

Sch. of Eng., Swinburne Univ. of Technol., Kuching

fYear

2007

fDate

4-6 Dec. 2007

Firstpage

1

Lastpage

5

Abstract

The common defects that could occur during the fabrication and long term operation of a tunable bandpass filter using RF MEMS switches are simulated with SONNET. The faulty responses of the defective filter are then analyzed and linked to the defects that cause them. The work carried out aims at being able to narrow down and possibly identify the defects quickly in future by measuring the faulty filter responses, thus enabling defects to be screened quickly or for the development of built-in self-testable filter.

Keywords

band-pass filters; built-in self test; circuit tuning; microswitches; radiofrequency filters; RF MEMS switches; SONNET; built-in self-testable filter; defective MEMS tunable RF filter; faulty filter responses; tunable bandpass filter; Band pass filters; Built-in self-test; Degradation; Fabrication; Fault diagnosis; Micromechanical devices; Radio frequency; Radiofrequency identification; Radiofrequency microelectromechanical systems; Switches; Defect; MEMS; RF Filter; Switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Applied Electromagnetics, 2007. APACE 2007. Asia-Pacific Conference on

Conference_Location

Melaka

Print_ISBN

978-1-4244-1434-5

Electronic_ISBN

978-1-4244-1435-2

Type

conf

DOI

10.1109/APACE.2007.4603931

Filename

4603931