Design of micro flow sensor with optimal detection spacing

A micro flow sensor structure with multiple temperature sensing elements was considered and numerically simulated in considering wide range flow rate. The sensor response obtained from the temperature difference between the sensing elements depends on the geometrical parameters of the design and processing materials. In order to determine the optimal spacing distance between the sensing elements around the central heater, the temperature distributions of the sensor corresponding to the variation of the flow rate and the spacing distance was calculated. From the results, the optimal spacing distance has to be determined by increasing the spacing between the sensing elements for high flow range.