Title :
An investigation of the performance of ECR plasma sources versus reactor size
Author :
Sze, F.C. ; Asmussen, J.
Author_Institution :
Michigan State University
Keywords :
Argon; Fault location; Inductors; Magnetic confinement; Plasma applications; Plasma confinement; Plasma density; Plasma measurements; Plasma sources; Plasma temperature;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697767