Title :
Effect of grounding arrangement on PZT thin film capacitor
Author :
Sulaiman, Suhana ; Lazim, Nor ; Bakar, Raudah ; Awang, Zaiki ; Dollah, Asban
Author_Institution :
Microwave Technol. Center, Univ. Teknol. MARA, Shah Alam
Abstract :
This paper reports on a new investigation carried out on the grounding arrangement of monolithic microwave integrated circuit (MMIC) thin film capacitors to improve their high frequency behavior. Via holes have been etched on the PZT to create the ground contact. The measurement shows an improvement in the capacitor response compared to direct contact to the exposed Pt area at the film edge.
Keywords :
MMIC; earthing; ferroelectric capacitors; lead compounds; thin film capacitors; MMIC; PZT thin film capacitor; grounding arrangement effect; monolithic microwave integrated circuit thin film capacitors; Area measurement; Capacitors; Etching; Frequency; Grounding; MMICs; Microwave integrated circuits; Monolithic integrated circuits; Thin film circuits; Transistors; MMIC capacitors; thin film; via hole;
Conference_Titel :
Applied Electromagnetics, 2007. APACE 2007. Asia-Pacific Conference on
Conference_Location :
Melaka
Print_ISBN :
978-1-4244-1434-5
Electronic_ISBN :
978-1-4244-1435-2
DOI :
10.1109/APACE.2007.4603975
