Title :
Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics
Author :
Chen, Min-Cheng ; Lin, Chang-Hsien ; Lin, Chia-Yi ; Hsueh, Fu-Kuo ; Huang, Wen-Hsien ; Lien, Yu-Chung ; Chen, Hsiu-Chih ; Hsueh, Hsiao-Ting ; Huang, Che-Wei ; Lin, Chih-Ting ; Liu, Yin-Chih ; Lee, Ta-Hsien ; Hua, Mu-Yi ; Qiu, Jian-Tai ; Liu, Mao-Chen ; Le
Author_Institution :
Nat. Nano Device Labs., Hsinchu, Taiwan
Abstract :
This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.
Keywords :
CMOS integrated circuits; DNA; VLSI; biomolecular electronics; embedded systems; field effect transistors; nanowires; pH; proteins; system-on-chip; thin film transistors; DNA probing; SoC-based portable bioelectronics; biological entities; device architecture; dual-channel thin-film transistor; embedded VLSI CMOS circuit; integration process; metal-gate-based thin-film transistor; microcrystalline silicon; nano-wire FET; pH; protein; self-aligned maskless thin-film transistor; self-aligned sidewall; size 50 nm; subfM DNA sensitivity; CMOS integrated circuits; DNA; FETs; Logic gates; Nanobioscience; Nanoscale devices; Sensitivity;
Conference_Titel :
VLSI Technology (VLSIT), 2012 Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4673-0846-5
Electronic_ISBN :
0743-1562
DOI :
10.1109/VLSIT.2012.6242494
