Title :
Uniform and long-slit microwave plasma generation from a longitudinal section electric mode coupling
Author :
Kim, Hae Jin ; Choi, Jin Joo ; Hong, Jung Mi
Author_Institution :
Dept. of Radio Sci. & Eng., Kwangwoon Univ., Seoul
Abstract :
Summary form only given. A stable uniform, long-slit atmospheric argon plasma is produced by coupling a longitudinal section electric (LSE) mode in a dielectric loaded rectangular waveguide. The microwave-induced plasma discharge system consists of a 2.45 GHz microwave source, circulator, 3-stub tuner, transformer, and tapered rectangular waveguide loaded with two dielectric slabs. A uniform 98 mm long atmospheric argon plasma is observed at a relatively low microwave power level of 350 W and gas flow rate of I0-15 liters per minute
Keywords :
argon; dielectric-loaded waveguides; high-frequency discharges; plasma instability; plasma sources; 2.45 GHz; 3-stub tuner; 350 W; 98 mm; Ar; circulator; dielectric loaded rectangular waveguide; dielectric slabs; electric mode coupling; long-slit microwave plasma generation; microwave source; microwave-induced plasma discharge; transformer; Argon; Atmospheric waves; Couplings; Dielectrics; Loaded waveguides; Microwave generation; Plasma sources; Plasma stability; Plasma waves; Rectangular waveguides;
Conference_Titel :
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location :
Traverse City, MI
Print_ISBN :
1-4244-0125-9
DOI :
10.1109/PLASMA.2006.1706930
