DocumentCode
2645408
Title
Very Low Threshold Current OMCVD Grown AiGaInAs Buried Heterostructure Quantum Well A Novel Etching Technique
Author
Kasukawa, A. ; Bhat, R. ; Caneau, C. ; Andreadakis, N. ; Pathak, B. ; Zah, C.E. ; Koza, M.A. ; Lee, T.P.
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
60
Lastpage
61
Keywords
Coatings; Electrons; Etching; Indium phosphide; Microscopy; Ohmic contacts; Power generation; Reflectivity; Threshold current;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638948
Filename
638948
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