Title :
Measurement of electromagnetic field in a radio frequency inductively coupled plasma at atmospheric pressure
Author :
Razzak, M. Abdur ; Takamura, Shuichi ; Uesugi, Yoshihiko ; Ohno, Noriyasu
Author_Institution :
Dept. of Energy Eng. & Sci., Nagoya Univ.
Abstract :
Summary form only given. The measurement of electromagnetic field of radio frequency induction thermal plasmas and their distribution characteristics are not well known because of their high temperature, which reaches at a value of about 10000 K or more. In this research, the magnetic field of radio frequency (0.5-2 MHz) thermal plasmas generated by inductively coupled plasma (ICP) technique at atmospheric pressure range are measured using a magnetic pick-up coil. The distributions of magnetic fields are also estimated by using a simple induction plasma model, and the calculated results are compared with those of the experimental ones. A distribution of measured magnetic field corresponds to an electrical conductivity of 7500 S/m is found to be a good agreement with that of the experimental results
Keywords :
plasma diagnostics; plasma sources; plasma temperature; plasma transport processes; 0.5 to 2 MHz; atmospheric pressure; electrical conductivity; electromagnetic field; magnetic pick-up coil; radiofrequency induction thermal plasmas; radiofrequency inductively coupled plasma; Atmospheric measurements; Atmospheric-pressure plasmas; Electromagnetic coupling; Electromagnetic fields; Electromagnetic measurements; Frequency measurement; Magnetic field measurement; Plasma measurements; Pressure measurement; Radio frequency;
Conference_Titel :
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location :
Traverse City, MI
Print_ISBN :
1-4244-0125-9
DOI :
10.1109/PLASMA.2006.1706960
