Title :
Time resolved eedf investigation for plasma heating
Author :
You, S.J. ; Kim, S.S. ; Ahn, S.K. ; Chang, H.Y.
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Daejeon
Abstract :
Summary form only given. Time resolved measurements of EEDF (electron energy distribution function) at various pressure ranges reveal that there are two distinct heating mechanisms as mentioned in previous studies. According to gas pressure, the processes to make high energy electrons which make ionization to sustain the plasma are clearly different. Theoretical calculation based on the non-local kinetics is in a good agreement with experiments
Keywords :
ionisation; plasma diagnostics; plasma heating; plasma kinetic theory; plasma pressure; electron energy distribution function; gas pressure; ionization; nonlocal kinetic calculation; plasma heating; time resolved measurements; Distribution functions; Electrons; Energy measurement; Energy resolution; Heating; Ionization; Kinetic theory; Plasma measurements; Pressure measurement; Time measurement;
Conference_Titel :
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location :
Traverse City, MI
Print_ISBN :
1-4244-0125-9
DOI :
10.1109/PLASMA.2006.1706967
