Title :
The Application Of In-situ Laser Reflectometry To MOCVD Growth
Author :
Hummel, S.G. ; Frateschi, N.F. ; Dapkus, P.D.
Author_Institution :
University of Southern California
fDate :
29 Jul-2 Aug 1991
Keywords :
Gallium arsenide; Laser applications; Laser beams; MOCVD; Monitoring; Optical modulation; Optical surface waves; Reflectivity; Reflectometry; Surface emitting lasers;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638949
