DocumentCode
2645573
Title
The Application Of In-situ Laser Reflectometry To MOCVD Growth
Author
Hummel, S.G. ; Frateschi, N.F. ; Dapkus, P.D.
Author_Institution
University of Southern California
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
62
Lastpage
63
Keywords
Gallium arsenide; Laser applications; Laser beams; MOCVD; Monitoring; Optical modulation; Optical surface waves; Reflectivity; Reflectometry; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638949
Filename
638949
Link To Document