Title :
Fast field solvers for thermal and electrostatic analysis
Author :
Székely, V. ; Rencz, M.
Author_Institution :
Dept. of Electron Devices, Tech. Univ. Budapest, Hungary
Abstract :
Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The μS-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool
Keywords :
computer aided analysis; electronic engineering computing; electrostatics; integrated circuit modelling; micromechanical devices; numerical analysis; temperature distribution; thermal analysis; μS-THERMANAL program; 2D-SUNRED program; IC chips; MEMS; Poisson equation; dynamic simulation; electrostatic analysis; fast field solvers; field solver tools; general field solver; microsystem elements; steady-state simulation; successive node reduction; suspended multilayered microsystem structures; thermal analysis; Birth disorders; Capacitive sensors; Electron devices; Electrostatic analysis; Heat sinks; Infrared sensors; Poisson equations; Tellurium; Thermal force; Thermal sensors;
Conference_Titel :
Design, Automation and Test in Europe, 1998., Proceedings
Conference_Location :
Paris
Print_ISBN :
0-8186-8359-7
DOI :
10.1109/DATE.1998.655907
