• DocumentCode
    2646289
  • Title

    Langmuir Probe And Optical Diapostics Of An inductively-coupled RF plasma

  • Author

    McDonald, D.S. ; Bachman, D. ; Chen, Peng ; Li, C.Y. ; Young, A.T. ; Leung, Ka Nang

  • Author_Institution
    Lawrence Berkeley Laboratory
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    100
  • Lastpage
    100
  • Keywords
    Atomic measurements; Hydrogen; Laboratories; Plasma applications; Plasma density; Plasma measurements; Plasma waves; Pollution measurement; Probes; Radio frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697793
  • Filename
    697793
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2646289