Title :
Langmuir Probe And Optical Diapostics Of An inductively-coupled RF plasma
Author :
McDonald, D.S. ; Bachman, D. ; Chen, Peng ; Li, C.Y. ; Young, A.T. ; Leung, Ka Nang
Author_Institution :
Lawrence Berkeley Laboratory
Keywords :
Atomic measurements; Hydrogen; Laboratories; Plasma applications; Plasma density; Plasma measurements; Plasma waves; Pollution measurement; Probes; Radio frequency;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697793
