• DocumentCode
    2646298
  • Title

    Simulating Oxygen RF Discharges with a kinetic PIC-MCC code

  • Author

    Vahedi, V. ; Lieberman, M.A. ; DiPeso, G. ; Birdsall, C.K. ; Rognlien, T.D. ; Hiskes, J.R. ; Cohen, Ronald H.

  • Author_Institution
    UC Berkeley
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    100
  • Lastpage
    100
  • Keywords
    Charge transfer; Electrons; Ionization; Kinetic theory; Laboratories; Monte Carlo methods; Oxygen; Radio frequency; Spontaneous emission; Surface discharges;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697794
  • Filename
    697794
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2646298