Title :
The validity of oes line-ratio method to determine the electron temperature in inductively coupled nitrogen plamas
Author :
Zhu, X.M. ; Pu, Y.K.
Author_Institution :
Dept. of Eng. Phys., Tsinghua Univ., Beijing
Abstract :
Summary form only given. The validity of the line-ratio method to determine the electron temperature in inductively coupled nitrogen plasmas using optical emission spectroscopy is investigated in the pressure range 0.4-100 milli-torr. It is found that when the pressure is higher than several mtorr, the linear kinetic processes of metastable nitrogen molecules, such as collisions of them with the vibrationally excited levels of the ground state, play an important role and the corona model is not correct. When the pressure higher than several tens of milli-torr, the non-linear kinetic processes of metastable molecules, such as the energy pooling reaction between two of them, become important and thus the line intensity is not in direct proportion to the electron density and the line-ratio has a significant dependence on electron density
Keywords :
metastable states; nitrogen; plasma collision processes; plasma density; plasma diagnostics; plasma nonlinear processes; plasma sources; plasma temperature; vibrational states; 0.4 to 100 mtorr; N2; corona model; electron density; electron temperature; energy pooling reaction; ground state; inductively coupled nitrogen plasmas; line-ratio method; metastable nitrogen molecules; nonlinear kinetic processes; optical emission spectroscopy; vibrationally excited levels; Electron emission; Electron optics; Kinetic theory; Land surface temperature; Metastasis; Nitrogen; Nonlinear optics; Optical coupling; Plasma temperature; Temperature distribution;
Conference_Titel :
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location :
Traverse City, MI
Print_ISBN :
1-4244-0125-9
DOI :
10.1109/PLASMA.2006.1707058
