Title :
Epitaxial Liftoff Technology For OEIC´s
Author :
Yablonovitch, E.
Author_Institution :
Navesink Research Center
fDate :
29 Jul-2 Aug 1991
Keywords :
Crystalline materials; Gallium arsenide; Glass; Optical materials; Optical waveguides; Optoelectronic devices; Semiconductor materials; Semiconductor thin films; Silicon; Substrates;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638984
