Title :
Reflectivity Measurements Of Electron Beam Written First Order Bragg Gratings On AlGaAs Rib Waveguides
Author :
Vasey, F. ; Ganière, J.D. ; Reinhart, F.K. ; Stauffer, J.M.
Author_Institution :
EPFL, Swiss Federal Institute of Technology
fDate :
29 Jul-2 Aug 1991
Keywords :
Bragg gratings; Electron beams; Mirrors; Optical coupling; Optical filters; Optical waveguides; Particle beams; Reflectivity; Resists; Writing;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638987
