DocumentCode
2648329
Title
Spectrometer On A Chip By Nanofabrication
Author
Hryniewicz, John ; Tiberio, Richard ; Chen, Yung Jui
Author_Institution
University of Maryland
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
16
Lastpage
17
Keywords
Chromium; Diffraction gratings; Electron beams; Etching; Lithography; Nanofabrication; Optical waveguides; Resists; Spectroscopy; Wavelength division multiplexing;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638991
Filename
638991
Link To Document