Title :
Spectrometer On A Chip By Nanofabrication
Author :
Hryniewicz, John ; Tiberio, Richard ; Chen, Yung Jui
Author_Institution :
University of Maryland
fDate :
29 Jul-2 Aug 1991
Keywords :
Chromium; Diffraction gratings; Electron beams; Etching; Lithography; Nanofabrication; Optical waveguides; Resists; Spectroscopy; Wavelength division multiplexing;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638991
