DocumentCode
2649169
Title
Flexible And Rigid Masks And Alignment In Binary Optics
Author
Everett, Patrick N. ; Delaney, William F. ; Griswold, Marsden P.
Author_Institution
Massachusetts Institute of Technology
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
19
Lastpage
20
Keywords
Chromium; Costs; Degradation; Integrated circuit technology; Laboratories; Lithography; Resists; Shape control; Stress; Surface acoustic wave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638995
Filename
638995
Link To Document