Title :
Microscope Metrology With Balanced Illumination
Author :
Everett, P.N. ; Goltsos, W.C.
Author_Institution :
MIT Lincoln Laboratory, 244 Wood Street, Lexington MA 02173
fDate :
29 Jul-2 Aug 1991
Keywords :
Diffraction; Laboratories; Lighting; Measurement standards; Metrology; Microscopy; Monitoring; Resists; Silicon compounds; Wavelength measurement;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.638996
