DocumentCode
2649328
Title
Microscope Metrology With Balanced Illumination
Author
Everett, P.N. ; Goltsos, W.C.
Author_Institution
MIT Lincoln Laboratory, 244 Wood Street, Lexington MA 02173
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
21
Lastpage
22
Keywords
Diffraction; Laboratories; Lighting; Measurement standards; Metrology; Microscopy; Monitoring; Resists; Silicon compounds; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.638996
Filename
638996
Link To Document