DocumentCode
2649757
Title
Wavelength trimming of integrated-optic microring filters by plasma treatment
Author
Wang, Tzyy-Jim ; Huang, Yen-Hao ; Chen, Hsuen-Li
Author_Institution
Inst. of Electro-Opt. Eng., Nat. Taipei Univ. of Technol., Taiwan
Volume
1
fYear
2003
fDate
15-19 Dec. 2003
Abstract
The resonant-wavelength trimming of integrated-optic microring filters using oxygen plasma treatment is demonstrated. By adjusting treatment parameters, the resonant wavelength can be effectively tuned in the range of 8.9 nm.
Keywords
integrated optics; micromachining; micromechanical devices; optical waveguide filters; plasma materials processing; O; integrated-optic microring filter; oxygen plasma treatment; resonant wavelength; wavelength trimming; Integrated optics; Optical filters; Optical resonators; Optical waveguides; Plasma applications; Plasma waves; Radio frequency; Resonance; Resonator filters; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1274522
Filename
1274522
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