Title :
Dynamic property test of a novel high g microaccelerometer
Author :
Yunbo, Shi ; Zhengqiang, Zhu ; Xiaopeng, Liu ; Jun, Liu ; Qiulin, Tan
Author_Institution :
Nat. Key Lab. for Electron. Meas. & Technol., North Univ. of China, Taiyuan, China
Abstract :
Aiming at the testing requirement in special situations, a kind of high overloading piezoresistive acceleration sensor with a beam-island structure, four sides of which are fixed, is designed. This acceleration sensor uses ceramic package and is encapsulated by nitrogen. Adjusting the dynamic speciality by Hopkinson impact equipment, the testing result indicates that the sensitivity and the linearity of the high g accelerometer are good, and the shock-resistibility is also in good state. The structure is still good and can output signals after impacted by 200 000 g, meanwhile it can effectively satisfy special testing requirements such as acutely impact and vibration.
Keywords :
accelerometers; dynamic testing; microsensors; piezoresistive devices; shock waves; Hopkinson impact equipment; beam-island structure; ceramic package; dynamic property test; encapsulation; high overloading piezoresistive acceleration sensor; microaccelerometer; shock resistibility; Acceleration; Accelerometers; Aerodynamics; Linearity; Packaging; Particle beams; Piezoresistance; Sensor phenomena and characterization; Strain measurement; Testing; anti overloading; dynamic testing; high g accelerometer; shock-resistibility;
Conference_Titel :
ASIC, 2009. ASICON '09. IEEE 8th International Conference on
Conference_Location :
Changsha, Hunan
Print_ISBN :
978-1-4244-3868-6
Electronic_ISBN :
978-1-4244-3870-9
DOI :
10.1109/ASICON.2009.5351325
