Title :
A novel preamplifier for MEMS microphone
Author :
Hua, Siliang ; Liu, Yan ; Zhang, Jian En ; Wang, Donghui ; Hou, Chaohuan
Author_Institution :
Digital Syst. Integration Lab., Chinese Acad. of Sci., China
Abstract :
MEMS microphone is used in various mobile devices, notebook applications, and hearing aids. This paper analyzes the electric model of the MEMS microphone elaborately and presents a preamplifier for MEMS Microphone. The preamplifier is realized in 0.18 ¿m CMOS HV technology which provides high bias voltage, impedance match and weak signal preamplifying with an area of 1050 ¿m*900 ¿m. The post-layout simulation results show that it can operate under 1.5 V~3.6 V with 56 ¿VRMS equivalent input noise.
Keywords :
CMOS integrated circuits; impedance matching; micromechanical devices; microphones; preamplifiers; CMOS HV technology; MEMS; bias voltage; electric model; equivalent input noise; impedance match; microphone; post-layout simulation; preamplifier; voltage 1.5 V to 3.6 V; CMOS technology; Circuit simulation; Hearing aids; Impedance; Micromechanical devices; Microphones; Preamplifiers; Semiconductor device modeling; Silicon; Voltage; MEMS microphone; Preamplifier; electric model; impedance match;
Conference_Titel :
ASIC, 2009. ASICON '09. IEEE 8th International Conference on
Conference_Location :
Changsha, Hunan
Print_ISBN :
978-1-4244-3868-6
Electronic_ISBN :
978-1-4244-3870-9
DOI :
10.1109/ASICON.2009.5351326
