DocumentCode
2650307
Title
Focused-ion-beam Micromachining Of Optical Surfaces In Semiconductor Laser Materials
Author
DeFreez, Richard K.
Author_Institution
Oregon Graduate Institute of Science and Technology Beaverton, OR 97006-1999
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
28
Lastpage
29
Keywords
Ion beams; Laser modes; Micromachining; Optical arrays; Optical materials; Particle beam optics; Semiconductor laser arrays; Semiconductor lasers; Semiconductor materials; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639001
Filename
639001
Link To Document