Title :
Focused-ion-beam Micromachining Of Optical Surfaces In Semiconductor Laser Materials
Author :
DeFreez, Richard K.
Author_Institution :
Oregon Graduate Institute of Science and Technology Beaverton, OR 97006-1999
fDate :
29 Jul-2 Aug 1991
Keywords :
Ion beams; Laser modes; Micromachining; Optical arrays; Optical materials; Particle beam optics; Semiconductor laser arrays; Semiconductor lasers; Semiconductor materials; Surface emitting lasers;
Conference_Titel :
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN :
0-87942-618-7
DOI :
10.1109/LEOSST.1991.639001
