Title :
Study Of The Electron Gas Behavior in an ECR multipolar plasma source
Author :
Mak, Pui-In ; Tan, Wei ; Sze, F.C. ; Grotjohn, Timothy A. ; Asmussen, J.
Author_Institution :
Michigan State University
Keywords :
Electromagnetic heating; Electrons; Magnetic confinement; Magnetic fields; Plasma confinement; Plasma density; Plasma measurements; Plasma properties; Plasma sources; Plasma waves;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697832