DocumentCode :
2650449
Title :
Study Of The Electron Gas Behavior in an ECR multipolar plasma source
Author :
Mak, Pui-In ; Tan, Wei ; Sze, F.C. ; Grotjohn, Timothy A. ; Asmussen, J.
Author_Institution :
Michigan State University
fYear :
1993
fDate :
1-3 June 1993
Firstpage :
115
Lastpage :
116
Keywords :
Electromagnetic heating; Electrons; Magnetic confinement; Magnetic fields; Plasma confinement; Plasma density; Plasma measurements; Plasma properties; Plasma sources; Plasma waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
Type :
conf
DOI :
10.1109/PLASMA.1992.697832
Filename :
697832
Link To Document :
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