DocumentCode :
2650550
Title :
Microwave field distribution in a new atmospheric pressure microwave plasma (APMP) system
Author :
Liu, Liang ; Zhang, Guixin ; Zhu, Zhijie ; Li, Yinan
Author_Institution :
Dept. of Electr. Eng., Tsinghua Univ., Beijing
fYear :
2006
fDate :
4-8 June 2006
Firstpage :
356
Lastpage :
356
Abstract :
Summary form only given. The production and maintenance of microwave plasma under the atmospheric condition have always been the major concern of researches. Some scientists used waveguide as cavity to produce a plasma jet, while the mass of microwave plasma was relatively hard to receive in atmospheric pressure. However, a few research institutes and companies have already developed mass of atmospheric pressure microwave plasma (APMP), such as CYRANNUS series, which can be widely applied. In this paper, we design a system to excite mass of APMP, emulate the chamber through software and measure the microwave field distribution to validate. This research can build a theoretical basis of microwave plasma excitation position and other characteristics under one atmospheric pressure. It will be useful in further study of the APMP
Keywords :
plasma jets; plasma sources; 1 atm; CYRANNUS series; atmospheric pressure microwave plasma; microwave field distribution; microwave plasma excitation; plasma jet; waveguide; Atmospheric waves; Atmospheric-pressure plasmas; Discharges; IEEE Transactions on Plasma Science; Laboratories; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma properties; Plasma waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. The 33rd IEEE International Conference on
Conference_Location :
Traverse City, MI
Print_ISBN :
1-4244-0125-9
Type :
conf
DOI :
10.1109/PLASMA.2006.1707229
Filename :
1707229
Link To Document :
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