• DocumentCode
    2651847
  • Title

    Device structure for the characterization of nanowire thermocouples

  • Author

    Szakmany, Gergo P. ; Krenz, Peter M. ; Orlov, Alexei O. ; Bernstein, Gary H. ; Porod, Wolfgang

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Notre Dame, Notre Dame, IN, USA
  • fYear
    2012
  • fDate
    10-11 June 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In order to demonstrate the feasibility of this approach, we report the measurements of the Seebeck coefficients of a palladium-gold and a palladium-chrome nanowire (70 nm wide and 50 nm thick) thermocouple. The thermocouple, heater, and thermometers were fabricated on top of 640 nm of thermally grown SiO2 on a silicon wafer using electron beam lithography and electron beam evaporation.
  • Keywords
    Seebeck effect; chromium; electron beam lithography; gold; nanowires; palladium; thermocouples; thermometers; Pd-Au; Pd-Cr; Seebeck coefficients; device structure; electron beam evaporation; electron beam lithography; nanowire thermocouple characterization; palladium-chrome nanowire thermocouple; palladium-gold nanowire thermocouple; silicon wafer; size 50 nm; size 70 nm; thermal growth; Current measurement; Heating; Junctions; Metals; Nanoscale devices; Temperature measurement; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Silicon Nanoelectronics Workshop (SNW), 2012 IEEE
  • Conference_Location
    Honolulu, HI
  • ISSN
    2161-4636
  • Print_ISBN
    978-1-4673-0996-7
  • Electronic_ISBN
    2161-4636
  • Type

    conf

  • DOI
    10.1109/SNW.2012.6243307
  • Filename
    6243307
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2651847