DocumentCode
2652571
Title
GalnAsP/l Short Cavity Laser Diodes With Facet Mirrors Etched By Chlorine Gas Reactive Ion Beam Etching
Author
Iwase, M. ; Matsumoto, N. ; Kasukawa, A.
Author_Institution
The Furukawa Electric Co.,Ltd.
fYear
1991
fDate
29 Jul-2 Aug 1991
Firstpage
47
Lastpage
48
Keywords
Diode lasers; Etching; Ion beams; Mirrors; Power generation;
fLanguage
English
Publisher
ieee
Conference_Titel
Epitaxial Materials and In-Situ Processing for Optoelectronic Devices, 1991/Microfabrication for Photonics and Optoelectronics, 1991. LEOS 1991 Summer Topical Meetings on
Print_ISBN
0-87942-618-7
Type
conf
DOI
10.1109/LEOSST.1991.639013
Filename
639013
Link To Document