Title :
MBE heterostructure device instabilities related to interfacial carbon impurities
Author :
Gray, M.L. ; Spector, M. ; Yoder, J.D.
Author_Institution :
AT&T Bell Laboratories, PA
Keywords :
Epitaxial layers; FETs; Frequency; Gallium arsenide; Impedance measurement; Impurities; Molecular beam epitaxial growth; Pollution measurement; Superlattices; Surface cleaning;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752686