Interdigitated electrode modelling for applications in dielectrophoresis

Author

Chung, C. ; Smith, S. ; Menachery, A. ; Bagnaninchi, P. ; Walton, A.J. ; Pethig, R.

Author_Institution

Inst. for Integrated Micro & Nano Syst., Univ. of Edinburgh, Edinburgh, UK

fYear

2011

fDate

4-7 April 2011

Firstpage

74

Lastpage

79

Abstract

Electrical test structures have been designed to enable the characterisation of interdigitated electrode structures in conductive solutions, as used in dielectrophoresis. Test masks have been fabricated to explore the impact of array size, finger separation and solution conductivity on the applied electric field. A circuit model based on a distributed RC network is proposed and evaluated, demonstrating close agreement with actual impedance measurements. This provides the capability to readily predict the voltage and phase along the length of electrodes used for dielectrophoresis and other applications.

Keywords

RC circuits; electric impedance measurement; electrodes; electrophoresis; integrated circuit modelling; actual impedance measurements; applied electric field; array size; circuit model; conductive solutions; dielectrophoresis; distributed RC network; electrical test structures; finger separation; interdigitated electrode modelling; interdigitated electrode structures; solution conductivity; test masks; Conductivity; Electrodes; Fingers; Frequency measurement; Impedance; Impedance measurement; Resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures (ICMTS), 2011 IEEE International Conference on

Conference_Location

Amsterdam

ISSN

1071-9032

Print_ISBN

978-1-4244-8526-0

Electronic_ISBN

1071-9032

Type

conf

DOI

10.1109/ICMTS.2011.5976863

Filename

5976863